Three-dimensional silicon integration

Synthesis of Three - Dimensional Mesoporous Silicon from Rice Husk via SHS Route

Silicon nanoparticles are the focus of attention thanks to their potentialities in advanced applications such as new batteries, photovoltaic cells and so on. The need to porous silicon is thus rising and will follow the same trend. In this work, highly porous nanostructured silicon is synthesized via Self-propagating high-temperature synthesis (SHS) route. Microstructural and phase analyses sho...

Monolithically integrated self-rolled-up microtube-based vertical coupler for three- dimensional photonic integration

Articles you may be interested in Vertically integrated metal-clad/silicon dioxide-shell microtube arrays for high-spatial-resolution light stimuli in saline Appl. On-chip intra-and inter-layer grating couplers for three-dimensional integration of silicon photonics Appl. Monolithically integrated low-loss silicon photonic wires and three-dimensional tapered couplers fabricated by self-profile t...

Technology Evaluation and Selection of 3DIC Integration Using a Three-Stage Fuzzy MCDM

For the purpose of the sustainable development in the global semiconductor industry, emerging three-dimensional integrated circuit (3DIC) integration technologies have demonstrated their importance as potential candidates for extending the lifespan of Moore’s Law. This study aimed to explore a technology selection process involving a three-stage fuzzy multicriteria decision-making (MCDM) approa...

On-chip intra- and inter-layer grating couplers for three-dimensional integration of silicon photonics

Integration of Three-Dimensional Waveguides by Femtosecond Laser Pulses

When femtosecond laser pulses are focused inside the bulk of transparent materials, the refractive-index change can be induced around the focal volume. This technique has been applied to fabricate three-dimensional photonic structures such as waveguides and couplers inside a wide variety of glasses. In this paper, we present fabrication and integration of three-dimensional waveguides in silica ...